Electron Beam Lithography System

Kungliga Tekniska Högskolan

The Department of Applied Physics is growing as several groups previously located at KTH Electrum (School of Information and Communication Technology, ICT) have moved to Applied Physics.
One of the main areas of research is quantum mechanical effects in solid matter. A basic requirement for this type of research is to be able to generate very small structures, in the 10 nm range. One essential tool to make such structures is Ebeam Lithography (EBL).

Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2017-08-28. Upphandlingen offentliggjordes den 2017-06-19.

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Upphandlingshistorik
Datum Dokument
2017-06-19 Meddelande om upphandling
2017-10-23 Meddelande om tilldelning