Leverantör: Oxford Instruments Gmbh

4 arkiverade upphandlingar

Nyligen genomförda upphandlingar där leverantören Oxford Instruments Gmbh nämns

2023-07-12   RIE and ICP-RIE systems (Chalmers tekniska högskola Aktiebolag)
Replacement of current RIE (Reactive Ion etching) and ICP-RIE (Inductively coupled plasma-RIE) systems in the MC2 Nanofabrication Laboratory, with new up-to-date systems. Tenders may be submitted for each one of the systems as well as for both systems in a combined offer. Visa upphandlingen »
Nämnda leverantörer: Oxford Instruments Gmbh Samco Inc.
2022-10-03   Plasma-enhanced chemical vapor deposition system (RISE Research Institutes of Sweden AB)
RISE wish to extend its capability in the area of plasma deposition by purchasing a fully functional load locked ICPCVD (or PECVD) deposition system including pumps which will allow us to move our processing to a higher TRL level in terms of substrate size, deposition processes and control. Visa upphandlingen »
Nämnda leverantörer: Oxford Instruments Gmbh
2015-03-24   ICP Dry Etcher (Chalmers University of Technology)
System for etching of thin layers of e.g. Silicon, Silicon nitride, Silicon dioxide, Niobium, Niobium nitride, as well as deeper structures in e.g. Silicon, Silicon carbide, and Indium phosphide substrates. The etching process modes will range from Reactive Ion Etching to Remote Plasma Etching. The system will also be used for remote plasma treatment of wafer surfaces prior bonding. Visa upphandlingen »
Nämnda leverantörer: Oxford Instruments Gmbh
2012-03-05   Atomic Layer Deposition System (Chalmers tekniska högskola AB)
The department of Microtechnology and Nanoscience has need for a high accuracy and high uniformity deposition tool, for growing thin films of oxides, nitrides, metals and other materials, using the atomic layer deposition process. It will be placed in a ballroom style class 100 cleanroom (ISO 5), and will be used by a large number of operators in a university laboratory environment. It must be easy to use and insensitive to frequent change of process between batches. The system operation must be … Visa upphandlingen »
Nämnda leverantörer: Oxford Instruments Gmbh