KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities.
The activities of the main users of this tool are primarily focussing on microfabrication of MEMS and photonics devices.
Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2019-06-26.
Upphandlingen offentliggjordes den 2019-05-23.
Objekt Upphandlingens omfattning
Titel: Procurement of a Vapour Hydrofluoric Acid (HF) Etcher
V-2019-0242
Produkter/tjänster: Mikroelektroniska maskiner, apparater och mikrosystem📦
Kort beskrivning:
“KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release...”
Kort beskrivning
KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities.
The activities of the main users of this tool are primarily focussing on microfabrication of MEMS and photonics devices.
The principal application of the procured instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without striction, in the release Etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials. The new aHF instrument will primarily be used for research and development of the release of silicon MEMS devices on silicon on insulator (SoI) wafers.
The offered instrument must be a complete vapour hydroflouric acid (HF) etcher of clean-room grade.
The instrument must be offered with a suitable maintenance kit for 2 years of planned instrument maintenance without extra cost.
Visa mer Kriterier för tilldelning
Priset är inte det enda tilldelningskriteriet och alla kriterier anges endast i upphandlingsdokumenten
Kontraktets, ramavtalets eller det dynamiska inköpssystemets varaktighet Beskrivning
Varaktighet: 10
Information om alternativen
Alternativ ✅
Beskrivning av alternativen:
“1) A suitable process vacuum pump for the instrument;
2) A suitable HF abatement unit (scrubber).”
Förfarande Typ av förfarande
Öppet förfarande
Administrativ information
Tidsfrist för mottagande av anbud eller begäran om deltagande: 2019-06-26
23:59 📅
Språk på vilka anbud eller ansökningar om deltagande kan lämnas in: svenska 🗣️
Språk på vilka anbud eller ansökningar om deltagande kan lämnas in: engelska 🗣️
Anbudet skall vara giltigt till och med: 2019-10-28 📅
Villkor för öppnande av anbud: 2019-06-27
00:00 📅
Kompletterande information Ytterligare information
Visma notice: https://opic.com/id/afzhojpszo Granskningsorgan
Namn: Förvaltningsrätten i Stockholm
Postort: Stockholm
Land: Sverige 🇸🇪
Källa: OJS 2019/S 100-241728 (2019-05-23)
Meddelande om tilldelning (2019-07-10) Objekt Beskrivning
Beskrivning av upphandlingen:
“The principal application of the procured instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very...”
Beskrivning av upphandlingen
The principal application of the procured instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction, in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials. The new aHF instrument will primarily be used for research and development of the release of silicon MEMS devices on silicon on insulator (SoI) wafers.
The offered instrument must be a complete vapour hydroflouric acid (HF) etcher of clean-room grade.
The instrument must be offered with a suitable maintenance kit for two years of planned instrument maintenance without extra cost.
Förfarande Administrativ information
Tidigare publikation om detta förfarande: 2019/S 100-241728
Tilldelning av kontrakt
1️⃣ Information om icke-tilldelning
Andra orsaker (avbrytande av förfarandet)
Kompletterande information Ytterligare information
“Motivation for cancelling
The reason for cancellation is an insufficient degree of competition due to the fact that, only one tender is qualified, i.e. has...”
Motivation for cancelling
The reason for cancellation is an insufficient degree of competition due to the fact that, only one tender is qualified, i.e. has fulfilled all mandatory requirements.
Visma notice: https://opic.com/id/affevqjfui
Visa mer
Källa: OJS 2019/S 133-326722 (2019-07-10)