Procurement of the I-line lithography system
KTH wants to procure a I-line lithography system which will be placed in KTHs clean room (Electrum Laboratory,
www.electrumlaboratoriet.se). The main objective of the procurement is to improve access to stepper lithography for all users by increasing the up-time and reduce the operator time compared to what we have today.
Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2015-04-20.
Upphandlingen offentliggjordes den 2015-03-10.
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Upphandlingshistorik
Datum |
Dokument |
2015-03-10
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Meddelande om upphandling
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