Nyligen genomförda upphandlingar där leverantören Oerlikon Deutschland Vertriebs GmbH nämns
2013-04-10physical vapour deposition machine V-2013-0162 (Kungliga Tekniska Högskolan)
The Department of Integrated Devices and Circuits conducts research on devices and circuits built on 100 mm sized silicon (Si) or transparent silicon-carbide (SiC) wafers. The application areas are CMOS technology, electronics for high voltage and harsh environment, sensor technologies and photonics. We are now investing in a physical vapour deposition (PVD) tool for replacing our current equipment for Ni, TiW and Al deposition.
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