KTH is seeking tenders for a Vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials.
Purpose of procurement
KTH is seeking tenders for one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities. The activities of the main users of this tool are primarily focusing on micro-fabrication of MEMS and photonics devices.
Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2020-07-13.
Upphandlingen offentliggjordes den 2020-06-09.
Leverantörer
Följande leverantörer nämns i tilldelningsbeslut eller andra upphandlingsdokument:
Objekt Upphandlingens omfattning
Titel: Vapour Hydrofluoric Acid (HF) Etcher
V-2019-0767
Produkter/tjänster: Elektroniska, elektromekaniska och elektrotekniska varor📦
Kort beskrivning:
“KTH is seeking tenders for a Vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for...”
Kort beskrivning
KTH is seeking tenders for a Vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials.
Purpose of procurement
KTH is seeking tenders for one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities. The activities of the main users of this tool are primarily focusing on micro-fabrication of MEMS and photonics devices.
1️⃣
Plats för genomförandet: Stockholm🏙️
Beskrivning av upphandlingen:
“KTH is seeking tenders for a Vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for...”
Beskrivning av upphandlingen
KTH is seeking tenders for a Vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials.
Purpose of procurement
KTH is seeking tenders for one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities. The activities of the main users of this tool are primarily focusing on microfabrication of MEMS and photonics devices.
Visa mer Kriterier för tilldelning
Priset är inte det enda tilldelningskriteriet och alla kriterier anges endast i upphandlingsdokumenten
Kontraktets, ramavtalets eller det dynamiska inköpssystemets varaktighet
Nedanstående tidsramar uttrycks i antal månader.
Beskrivning
Varaktighet: 12
Förfarande Typ av förfarande
Öppet förfarande
Administrativ information
Tidsfrist för mottagande av anbud eller begäran om deltagande: 2020-07-13
23:59 📅
Språk på vilka anbud eller ansökningar om deltagande kan lämnas in: engelska 🗣️
Språk på vilka anbud eller ansökningar om deltagande kan lämnas in: svenska 🗣️
Anbudet skall vara giltigt till och med: 2020-10-13 📅
Villkor för öppnande av anbud: 2020-07-14
00:00 📅
Kompletterande information Ytterligare information
Visma notice: https://opic.com/id/afearrupkq Granskningsorgan
Namn: Förvaltningsrätten i Stockholm
Postort: Stockholm
Land: Sverige 🇸🇪
Källa: OJS 2020/S 112-271221 (2020-06-09)
Meddelande om tilldelning (2020-12-17) Objekt Upphandlingens omfattning
Kort beskrivning:
“KTH is seeking tenders for a vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for...”
Kort beskrivning
KTH is seeking tenders for a vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials.
Visa mer
Upphandlingens totala värde (exklusive moms): USD 170 000 💰
Beskrivning
Beskrivning av upphandlingen:
“KTH is seeking tenders for a vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for...”
Beskrivning av upphandlingen
KTH is seeking tenders for a vapour hydrofluoric acid etcher. The principal application of the instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials.
Visa mer Kriterier för tilldelning
Kvalitetskriterium (namn): Performance
Kvalitetskriterium (viktning): 57 %
Pris (korrigeringskoefficient): 43 %
Förfarande Administrativ information
Tidigare publikation om detta förfarande: 2020/S 112-271221
Tilldelning av kontrakt
1️⃣
Datum för ingående av avtalet: 2020-11-24 📅
Information om anbud
Antal mottagna anbud: 2
Entreprenörens namn och adress
Namn: Memsstar Ltd
Nationellt registreringsnummer: memsstar Ltd
Postadress: 1 Fleming Road
Postort: Livingston
Postnummer: EH54 7BN
Land: Storbritannien 🇬🇧
E-post: toni_sandbrink-koblenz@memsstar.com📧
Region: United Kingdom 🏙️
URL: http://www.memsstar.com🌏
Entreprenören är ett litet eller medelstort företag ✅ Uppgifter om kontraktets/partiets värde (exklusive moms)
Uppskattat totalt värde på kontraktet/lotten: USD 170 000 💰
Kontraktets/lottens totala värde: USD 170 000 💰
Kompletterande information Ytterligare information
Visma notice: https://opic.com/id/afqfbfchps
Källa: OJS 2020/S 249-620203 (2020-12-17)