Procurement of CMP (chemical-mechanical planarisation) equipment
In order to take the next step towards 3D integration of devices a process for CMP, Chemical Mechanical Planarisation will be established. KTH will award a contract to a single supplier for a complete chemical-mechanical planarisation (CMP). Most user groups, working on different materials and applications are interested to use the new possibilities given by CMP, but there is no previous experience from CMP processing at Electrum Lab. The tool will be placed in multi user environment and the intention is to issue driving licenses to representatives from different user groups with the goal to integrate CMP into their processes. Hence we foresee a user base of about 10 users. Given these boundary conditions, it is important that the tool is flexible and user friendly.
Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2016-06-02.
Upphandlingen offentliggjordes den 2016-04-21.
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Upphandlingshistorik
| Datum |
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| 2016-04-21
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Meddelande om upphandling
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