Four dry vacuum pumps

Kungliga Tekniska Högskolan, School of ICT

We are looking for four dry vacuum pumps to be integrated with an existing P5000 etching and deposition multi chamber cluster tool delivered by Applied Materials. The pumps will serve one of the etching/deposition chambers each, and must be fully compatible with the respective processes.

Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2011-04-15. Upphandlingen offentliggjordes den 2011-03-28.

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Upphandlingshistorik
Datum Dokument
2011-03-28 Meddelande om upphandling