Nyligen genomförda upphandlingar där leverantören LithExx-Systems GmbH nämns
2022-10-11Automated Resist Processing System (Lunds universitet)
Scope
Lund Nano Lab is planning to purchase an automated wafer processing cluster tool for spin coating and development. This system must contain process automation and be capable of performing sample preparation including adhesion promotion HMDS coating, resist spin-coating, sample baking and automated wet chemical development with minimum manual handling, via user-defined recipes. The system must be capable of handling several of our most sensitive and commonly used resists. A key attribute of the …
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