Nyligen genomförda upphandlingar av halvledare i Sverige
2019-05-23Procurement of a Vapour Hydrofluoric Acid (HF) Etcher (Kungliga Tekniska Högskolan)
KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities.
The activities of the main users of this tool are primarily focussing on microfabrication of MEMS and photonics devices.
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