Nyligen genomförda upphandlingar av Kungliga Tekniska Högskolan, School of ICT
2011-03-28Four dry vacuum pumps (Kungliga Tekniska Högskolan, School of ICT)
We are looking for four dry vacuum pumps to be integrated with an existing P5000 etching and deposition multi chamber cluster tool delivered by Applied Materials. The pumps will serve one of the etching/deposition chambers each, and must be fully compatible with the respective processes.
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