Atomic layer deposition tool
This is a tender for the purchase of an atomic layer deposition (ALD) tool, capable of both thermal and
plasma ALD, for research on ALD of electronic grade thin films of the group 13 nitrides: AlN, GaN and
InN and their alloys.
Sista ansökningsdag
Tidsfristen för mottagande av anbud var 2016-12-08.
Upphandlingen offentliggjordes den 2016-10-31.
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Var?
Upphandlingshistorik
| Datum |
Dokument |
| 2016-10-31
|
Meddelande om upphandling
|