Nyligen genomförda upphandlingar där leverantören Ferrotec (USA) Corporation nämns
2018-05-17Electron Beam Evaporator for enabling advanced fabrication processes at Lund Nano Lab (Lunds universitet)
Scope:
Lund Nano Lab is planning to purchase a new electron beam (e-beam) evaporator system. This system will be highly automated, capable of multi-layer deposition on substrates up to 150 mm diameter, via a user defined recipe. The system will be capable of evaporating materials with high melting temperatures such as tungsten and molybdenum. A key attribute of the system will be a very short pump down time, resulting in completion of a simple evaporation process (vent — evacuate — evaporate (e.g. 100 nm …
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