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2021-06-18Hybrid thin Film Deposition System (Kungliga Tekniska Högskolan)
Purpose of procurement
KTH is seeking tenders for a new hybrid thin film deposition system to be used for micro- and nanostructure fabrication.
The main application of the procured tool will be metallisation of microelectronic circuits and hardmasks for etching using photoresist-liftoff techniques, making temperature control vitally important to avoid resist burning. Substrates will be mainly individual chips (possibly up to 80 % of the usage) and wafers up to 4’’ diameter (remaining 20 %), but with …
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2011-12-22Thin film deposition system (Göteborgs universitet)
Invitation.
University of Gothenburg invites you to submit a tender for a Thin film deposition system.
Contracting Authority.
Göteborgs universitet, (org nr. 202100-3153), referred to as the University of Gothenburg, is the contracting authority.
Background and Scope.
The Department of Physics is currently focusing increased attention on spintronics research. As a part of this effort the department will procure a thin film deposition system capable of high-precision deposition of high-quality thin film …
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