2016-04-21Procurement of CMP (chemical-mechanical planarisation) equipment (Kungliga Tekniska Högskolan)
In order to take the next step towards 3D integration of devices a process for CMP, Chemical Mechanical Planarisation will be established. KTH will award a contract to a single supplier for a complete chemical-mechanical planarisation (CMP). Most user groups, working on different materials and applications are interested to use the new possibilities given by CMP, but there is no previous experience from CMP processing at Electrum Lab. The tool will be placed in multi user environment and the intention is …
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